TY  - BOOK
AU  - Baltes,Henry
ED  - ebrary, Inc.
TI  - Enabling technologies for MEMS and nanodevices: advanced micro and nanosystems 
AV  - TK7874 .E53 2013eb
PY  - 2013///
CY  - Weinheim [Germany]
PB  - Wiley
KW  - Microelectronics
KW  - Nanotechnology
KW  - Microelectromechanical systems
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10683273
ER  -