01209nam a2200301 a 4500001001200000003000800012006001900020007001500039008004100054020001800095020002700113040002100140035002100161050002400182245014800206260004000354300002400394504005100418533015200469650002200621650002000643650003600663655002900699700001900728710001700747856012600764999001700890ebr10683273CaPaEBRm        u        cr cn|||||||||130422s2013    gw a    sb    001 0 eng d  z9783527334988  z9783527675043 (e-book)  aCaPaEBRcCaPaEBR  a(OCoLC)84696316914aTK7874b.E53 2013eb00aEnabling technologies for MEMS and nanodevicesh[electronic resource] :badvanced micro and nanosystems /cedited by Henry Baltes ... [et al.].  aWeinheim [Germany] :bWiley,c2013.  axii, 427 p. :bill.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectronics. 0aNanotechnology. 0aMicroelectromechanical systems. 7aElectronic books.2local1 aBaltes, Henry.2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10683273zAn electronic book accessible through the World Wide Web; click to view  c32495d32495