@book{55084,
	author = {Maluf, Nadim. and Williams, Kirt. and ebrary, Inc.},
	title = {An introduction to microelectromechanical systems engineering},
	publisher = {Artech House,},
	year = {2004.},
	series = {Artech House microelectromechanical systems (MEMS) series},
	address = {Boston :},
	edition = {2nd ed.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10081925}
}