@book{55147,
	author = {Beeby, Stephen. and ebrary, Inc.},
	title = {MEMS mechanical sensors},
	publisher = {Artech House,},
	year = {c2004.},
	series = {Artech House microelectromechanical systems (MEMS) series},
	address = {Boston :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10081990}
}