TY  - BOOK
AU  - Beeby,Stephen
ED  - ebrary, Inc.
TI  - MEMS mechanical sensors
T2  - Artech House microelectromechanical systems (MEMS) series
AV  - TK7875 .M4537 2004eb
U1  - 681/.2 22
PY  - 2004///
CY  - Boston
PB  - Artech House
KW  - Microelectromechanical systems
KW  - Detectors
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10081990
ER  -