01320nam a2200301 a 4500001001200000003000800012006001900020007001500039008004100054020001800095020002700113040002100140035002100161050002800182082001600210245012800226260005400354300006500408504005100473533015200524588009400676650003600770650002300806655002900829700001700858710001700875856012600892ebr10674819CaPaEBRm     o  u        cr cn|||||||||130508s2010    enkad   sb    001 0 eng d  z9781848211902  z9781118622674 (e-book)  aCaPaEBRcCaPaEBR  a(OCoLC)77251783114aTK7875b.M532487 2010eb04a621.38122200aMicro, nanosystems, and systems on chipsh[electronic resource]bmodeling, control, and estimation /cedited by Alina Voda.  aLondon :bISTE ;aHoboken, N.J. :bWiley,cc2010.  a1 online resource (xii, 308 p.) :bill. (some col.), charts.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries.  aDescription based on online resource; title from title page (ebrary, viewed May 8, 2013). 0aMicroelectromechanical systems. 0aSystems on a chip. 7aElectronic books.2local1 aVoda, Alina.2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10674819zAn electronic book accessible through the World Wide Web; click to view