01423nam a2200337 a 4500001001200000003000800012006001900020007001500039008004100054010001700095020004300112020002700155040002100182035002100203050002600224082001200250245016800262260005600430300003700486490004200523504005100565533015200616650003600768655002900804700001900833700002300852710001700875830005000892856012600942999001701068ebr10671225CaPaEBRm        u        cr cn|||||||||091112s2010    nyuad   sb    001 0 eng d  z  2009044341  z9781608764747 (hardcover : alk. paper)  z9781613246986 (e-book)  aCaPaEBRcCaPaEBR  a(OCoLC)84762647014aTK7875b.M5284 2010eb04a62122200aMicro electro mechanical systems (MEMS)h[electronic resource] :btechnology, fabrication processes and applications /cBritt Ekwall and Mikkel Cronquist, editors.  aHauppauge, N.Y. :bNova Science Publishers,cc2010.  axii, 391 p. :bill. (some col.).1 aNanotechnology science and technology  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectromechanical systems. 7aElectronic books.2local1 aEkwall, Britt.1 aCronquist, Mikkel.2 aebrary, Inc. 0aNanotechnology science and technology series.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10671225zAn electronic book accessible through the World Wide Web; click to view  c62367d62367