@book{63697,
	author = {National Research Council (U.S.). and ebrary, Inc.},
	title = {Microelectromechanical systems},
	publisher = {National Academy Press,},
	year = {1997.},
	address = {Washington, DC :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10055038}
}