01532nam a2200301Ia 4500001001200000003000800012006001900020007001500039008004100054010001700095020003200112040002100144035002000165050002500185082001600210110013100226245031000357260005300667300002300720504005200743533015200795650003300947650006100980655002901041710001701070856012601087999001701213ebr10055038CaPaEBRm        u        cr cn|||||||||971103s1997    dcua    sb    000 0 eng d  z   97080865   z0585002509 (electronic bk.)  aCaPaEBRcCaPaEBR  a(OCoLC)5301105114aTK7874b.N333 1997eb04a621.3812212 aNational Research Council (U.S.).bCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems.10aMicroelectromechanical systemsh[electronic resource] :badvanced materials and fabrication methods /cCommittee on Advanced Materials and Fabrication Methods for Microelectromechanical Systems, National Materials Advisory Board, Commission on Engineering and Technical Systems, National Research Council.  aWashington, DC :bNational Academy Press,c1997.  axiv, 61 p. :bill.  aIncludes bibliographical references (p. 51-55).  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectronicsxMaterials. 0aMicroelectromechanical systemsxDesign and construction. 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10055038zAn electronic book accessible through the World Wide Web; click to view  c63697d63697