@book{64472,
	author = {Hennessy, Theodore C. and ebrary, Inc.},
	title = {Lithography},
	publisher = {Nova Science,},
	year = {c2011.},
	series = {Engineering tools, techniques and tables},
	address = {New York :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10659070}
}