TY  - BOOK
AU  - Hennessy,Theodore C.
ED  - ebrary, Inc.
TI  - Lithography: principles, processes and materials 
T2  - Engineering tools, techniques and tables
AV  - TK7872.M3 L58 2011eb
U1  - 621.3815/31 22
PY  - 2011///
CY  - New York
PB  - Nova Science
KW  - Microlithography
KW  - Microfabrication
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10659070
ER  -