@book{66481,
	author = {Mack, Chris A. and ebrary, Inc.},
	title = {Fundamental principles of optical lithography},
	publisher = {Wiley,},
	year = {c2007.},
	address = {Chichester, West Sussex, England ;},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10300846}
}