TY  - BOOK
AU  - Mack,Chris A.
ED  - ebrary, Inc.
TI  - Fundamental principles of optical lithography: the science of microfabrication 
AV  - TK7874 .M196 2007eb
U1  - 621.3815/31 22
PY  - 2007///
CY  - Chichester, West Sussex, England, Hoboken, NJ, USA
PB  - Wiley
KW  - Integrated circuits
KW  - Design and construction
KW  - Microlithography
KW  - Industrial applications
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10300846
ER  -