01409nam a2200361 a 4500001001200000003000800012006001900020007001500039008004100054010001700095015001900112016001800131020001800149020001500167020002500182020002200207040002100229035002100250050002500271082002000296100001900316245012300335260007500458300002500533504005100558533015200609650005000761650004700811655002900858710001700887856012600904999001701030ebr10300846CaPaEBRm        u        cr cn|||||||||071026s2007    enka    sb    001 0 eng    z  2007044548  aGBA7914832bnb7 z0142769902Uk  z9780470018934  z0470018933  z9780470727300 (pbk.)  z0470727306 (pbk.)  aCaPaEBRcCaPaEBR  a(OCoLC)60862429014aTK7874b.M196 2007eb04a621.3815/312221 aMack, Chris A.10aFundamental principles of optical lithographyh[electronic resource] :bthe science of microfabrication /cChris Mack.  aChichester, West Sussex, England ;aHoboken, NJ, USA :bWiley,cc2007.  axvii, 515 p. :bill.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2013.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aIntegrated circuitsxDesign and construction. 0aMicrolithographyxIndustrial applications. 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10300846zAn electronic book accessible through the World Wide Web; click to view  c66481d66481