@book{70488,
	author = {ebrary, Inc.},
	title = {Database needs for modeling and simulation of plasma processing},
	publisher = {National Academy Press,},
	year = {1996.},
	series = {The compass series},
	address = {Washington, D.C. :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10056959}
}