01525nam a2200313 a 4500 ebr10056959 CaPaEBR m u cr cn||||||||| 961029s1996 dcu sb 100 0 eng 96070732 0309055911 CaPaEBR CaPaEBR (OCoLC)43475625 TK7871.85 .D374 1996eb Database needs for modeling and simulation of plasma processing [electronic resource] / Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council. Washington, D.C. : National Academy Press, 1996. 64 p. The compass series Includes bibliographical references. Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Semiconductors Design and construction Congresses. Plasma engineering Databases Congresses. Plasma engineering Computer simulation Congresses. Electronic books. local ebrary, Inc. Compass series (Washington, D.C.) http://site.ebrary.com/lib/rucke/Doc?id=10056959 An electronic book accessible through the World Wide Web; click to view 70488 70488