Database needs for modeling and simulation of plasma processing
ebrary, Inc
text
bibliography
conference publication
Electronic books.
dcu
Washington, D.C
National Academy Press
1996
monographic
eng
64 p.
Panel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
Includes bibliographical references.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.
Semiconductors
Design and construction
Congresses
Plasma engineering
Databases
Congresses
Plasma engineering
Computer simulation
Congresses
TK7871.85 .D374 1996eb
Compass series (Washington, D.C.)
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