TY  - BOOK
ED  - ebrary, Inc.
TI  - Database needs for modeling and simulation of plasma processing
T2  - The compass series
AV  - TK7871.85 .D374 1996eb
PY  - 1996///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Semiconductors
KW  - Design and construction
KW  - Congresses
KW  - Plasma engineering
KW  - Databases
KW  - Computer simulation
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10056959
ER  -