TY  - BOOK
AU  - Park,Jong-Hee
AU  - Sudarshan,T.S.
ED  - ebrary, Inc.
TI  - Chemical vapor deposition
T2  - Surface engineering series
AV  - TS695 .C52 2001eb
U1  - 671.7/35 21
PY  - 2001///
CY  - Materials Park, Ohio
PB  - ASM International
KW  - Vapor-plating
KW  - Refractory coating
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references; Electronic reproduction; Palo Alto, Calif.; ebrary; 2013; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10323519
ER  -