TY  - BOOK
AU  - Suzuki,Kunihiro
TI  - Ion implantation and activation
SN  - 9781608057924 (e-book)
AV  - QC702.7.I55 S89 2013eb
PY  - 2013///
CY  - Sharjah
PB  - Bentham Science Publishers
KW  - Ion implantation
KW  - Ion accelerators
KW  - Electronic books
N1  - Includes bibliographical references and index
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10817749
ER  -