@book{77963,
	author = {International Conference on Materials for Advanced Technologies and Khine, Lynn.},
	title = {NEMS/MEMS technology and devices :},
	publisher = {Trans Tech Publications,},
	year = {[2011]},
	series = {Advanced materials research,},
	address = {Durnten-Zurich, Switzerland :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10817952}
}