NEMS/MEMS technology and devices
selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
International Conference on Materials for Advanced Technologies (2011 : Singapore),
creator
Khine, Lynn.
Tsai, Julius M.
text
bibliography
conference publication
Electronic books.
sz
2011
2011
monographic
eng
1 online resource (233 pages) : illustrations (some color).
edited by Lynn Khine and Julius M. Tsai.
Includes bibliographical references and indexes.
Nanoelectromechanical systems
Congresses
Microelectromechanical systems
Congresses
TK7875 .I538 2011eb
233
NEMS/MEMS technology and devices : selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore
International Conference on Materials for Advanced Technologies.
Durnten-Zurich, Switzerland : Trans Tech Publications, [2011]
228 pages ; 25 cm.
1022-6680 ;
(OCoLC)ocn751790683
(DLC)10817952
Advanced materials research ; v. 254
9783038136095 (e-book)
http://site.ebrary.com/lib/rucke/Doc?id=10817952
http://site.ebrary.com/lib/rucke/Doc?id=10817952
CaPaEBR
110726
ebr10817952
eng