TY  - BOOK
AU  - Khine,Lynn
AU  - Tsai,Julius M.
ED  - International Conference on Materials for Advanced Technologies
TI  - NEMS/MEMS technology and devices: selected, peer reviewed papers from the International conference on materials for advanced technologies (ICMAT 2011), Symposium G: June 26 - July 1, 2011, Suntec, Singapore 
T2  - Advanced materials research,
AV  - TK7875 .I538 2011eb
U1  - 233 23
PY  - 2011///]
CY  - Durnten-Zurich, Switzerland
PB  - Trans Tech Publications
KW  - Nanoelectromechanical systems
KW  - Congresses
KW  - Microelectromechanical systems
KW  - Electronic books
N1  - Includes bibliographical references and indexes
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10817952
ER  -