TY  - BOOK
AU  - Osten,Wolfgang
AU  - Reingand,Nadya
ED  - ebrary, Inc.
TI  - Optical imaging and metrology: advanced technologies 
AV  - QC88 .O68 2012eb
PY  - 2012///
CY  - Weinheim, Germany
PB  - Wiley-VCH
KW  - Metrology
KW  - Intrinsic optical imaging
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10575536
ER  -