@book{82479,
	author = {Bao, Min-Hang. and ebrary, Inc.},
	title = {Analysis and design principles of MEMS devices},
	publisher = {Elsevier,},
	year = {c2005.},
	address = {Amsterdam ;},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10138376}
}