01177nam a2200313Ia 4500 ebr10138376 CaPaEBR m u cr cn||||||||| 050214s2005 ne a fsb 001 0 eng d GBA515718 bnb 0444516166 (hbk.) 008045562X CaPaEBR CaPaEBR (OCoLC)162130017 TK7875 .B36 2005eb 621.381 22 Bao, Min-Hang. Analysis and design principles of MEMS devices [electronic resource] / by Minhang Bao. Amsterdam ; Oxford : Elsevier, c2005. xii, 312 p. : ill. Includes bibliographical references and index. Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Microelectromechanical systems. Microtechnology. Electronic books. local ebrary, Inc. http://site.ebrary.com/lib/rucke/Doc?id=10138376 An electronic book accessible through the World Wide Web; click to view 82479 82479