TY  - BOOK
AU  - Bao,Min-Hang
ED  - ebrary, Inc.
TI  - Analysis and design principles of MEMS devices
AV  - TK7875 .B36 2005eb
U1  - 621.381 22
PY  - 2005///
CY  - Amsterdam, Oxford
PB  - Elsevier
KW  - Microelectromechanical systems
KW  - Microtechnology
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10138376
ER  -