01177nam a2200313Ia 4500001001200000003000800012006001900020007001500039008004100054015001900095020002200114020001500136040002100151035002100172050002400193082001600217100001900233245009300252260004500345300002400390504005100414533015200465650003600617650002100653655002900674710001700703856012600720999001700846ebr10138376CaPaEBRm        u        cr cn|||||||||050214s2005    ne a   fsb    001 0 eng d  aGBA5157182bnb  z0444516166 (hbk.)  z008045562X  aCaPaEBRcCaPaEBR  a(OCoLC)16213001714aTK7875b.B36 2005eb04a621.3812221 aBao, Min-Hang.10aAnalysis and design principles of MEMS devicesh[electronic resource] /cby Minhang Bao.  aAmsterdam ;aOxford :bElsevier,cc2005.  axii, 312 p. :bill.  aIncludes bibliographical references and index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2009.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectromechanical systems. 0aMicrotechnology. 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10138376zAn electronic book accessible through the World Wide Web; click to view  c82479d82479