@book{83432,
	author = {International Conference on Advanced Micro-Device Engineering and Hosaka, Sumio.},
	title = {Advanced micro-device engineering IV :},
	publisher = {Trans Tech Publications,},
	year = {2014.},
	series = {Key Engineering Materials,},
	address = {Durnten-Zurich, Switzerland :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10827145}
}