02320nam a2200397 i 4500001001200000003000800012006001900020007001500039008004100054020001800095020002700113040003500140035002100175050002500196082001600221111010400237245025600341264006700597264001200664300006000676336002100736337002300757338003200780490005600812504008100868588010300949590014701052650003401199655002201233700001901255776045201274797001201726830004101738856012601779999001701905ebr10827145CaPaEBRm     o  d        cr cn|||||||||140120t20142014sz a    ob    001 0 eng d  z9783037859629  a9783038263432 (e-book)  aCaPaEBRbengerdaepncCaPaEBR  a(OCoLC)86897133914aTK7874b.I584 2014eb04a621.3812232 aInternational Conference on Advanced Micro-Device Engineeringn(4th :d2012 :cKiry�u-shi, Japan)10aAdvanced micro-device engineering IV :bselected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan /cedited by Sumio Hosaka. 1aDurnten-Zurich, Switzerland :bTrans Tech Publications,c2014. 4c�2014  a1 online resource (228 pages) :billustrations, tables.  atext2rdacontent  acomputer2rdamedia  aonline resource2rdacarrier1 aKey Engineering Materials,x1662-9795 ;vVolume 596  aIncludes bibliographical references at the end of each chapters and indexes.  aDescription based on online resource; title from PDF title page (ebrary, viewed January 20, 2014).  aElectronic reproduction. Palo Alto, Calif. : ebrary, 2014. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. 0aMicroelectronicsvCongresses. 0aElectronic books.1 aHosaka, Sumio.08iPrint version:aInternational Conference on Advanced Micro-Device Engineering.tAdvanced micro-device engineering IV : selected, peer reviewed papers from the 4th International Conference on Advanced Micro-Device Engineering (AMDE 2012), December 7, 2012, Kiryu City Performing Arts Center, Kiryu, Japan.dDurnten-Zurich, Switzerland : Trans Tech Publications, c2014 h234 pages kKey engineering materials ; Volume 596.x1662-9795 z97830378596292 aebrary. 0aKey engineering materials ;vv. 596.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10827145zAn electronic book accessible through the World Wide Web; click to view  c83432d83432