@book{83896,
	author = {Franssila, Sami. and ebrary, Inc.},
	title = {Introduction to microfabrication},
	publisher = {John Wiley & Sons,},
	year = {2010.},
	address = {Chichester, West Sussex, England ;},
	edition = {2nd ed.},
	note = {Includes index.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10419414}
}