01223nam a2200325Ia 4500001001200000003000800012006001900020007001500039008004100054010001700095020002600112040002100138035002100159050002400180082001600204100002100220245007900241250001200320260008100332300002400413500002000437533015200457650003600609650004100645650002200686655002900708710001700737856012600754999001700880ebr10419414CaPaEBRm        u        cr cn|||||||||100317s2010    enka    s     001 0 eng d  z  2010010076  z9780470749838 (cloth)  aCaPaEBRcCaPaEBR  a(OCoLC)68999500314aTK7875b.F73 2010eb04a621.3812221 aFranssila, Sami.10aIntroduction to microfabricationh[electronic resource] /cSami Franssila.  a2nd ed.  aChichester, West Sussex, England ;aHoboken, NJ :bJohn Wiley & Sons,c2010.  axiv, 518 p. :bill.  aIncludes index.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2010.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aMicroelectromechanical systems. 0aElectronic apparatus and appliances. 0aMicrofabrication. 7aElectronic books.2local2 aebrary, Inc.40uhttp://site.ebrary.com/lib/rucke/Doc?id=10419414zAn electronic book accessible through the World Wide Web; click to view  c83896d83896