@book{85422,
	author = {Vilaithong, Thiraphat. and PIM & ASIP 2004},
	title = {Particle beams & plasma interaction on materials and ion & plasma finishing 2004 :},
	publisher = {Trans Tech Publications,},
	year = {[2005]},
	series = {Diffusion and defect data - solid state data. Pt. B, Solid state phenomena,},
	address = {Uetikon-Zuerich :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10828918}
}