@book{89668,
	author = {Campanella, Humberto. and ebrary, Inc.},
	title = {FBAR, MEMS and NEMS resonator design and applications},
	publisher = {Artech House,},
	year = {c2010.},
	address = {Boston :},
	note = {Includes index.},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10393281}
}