TY  - BOOK
AU  - Campanella,Humberto
ED  - ebrary, Inc.
TI  - FBAR, MEMS and NEMS resonator design and applications
AV  - TK5981 .C36 2010eb
PY  - 2010///
CY  - Boston
PB  - Artech House
KW  - Acoustic surface wave devices
KW  - Electric resonators
KW  - Electronic books
KW  - local
N1  - Includes index; Electronic reproduction; Palo Alto, Calif.; ebrary; 2010; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10393281
ER  -