@book{99882,
	author = {International Symposium on Silicon Science and Hanaizumi, Osamu. and ebrary, Inc. and International Conference on Advanced Micro-Device Engineering},
	title = {Silicon science and advanced micro-device engineering II},
	publisher = {Trans Tech Publications,},
	year = {2012.},
	address = {Durnten-Zurich :},
	url = {http://site.ebrary.com/lib/rucke/Doc?id=10604223}
}