01838nam a2200361 a 4500 ebr10604223 CaPaEBR m u cr cn||||||||| 121005s2012 sz a sb 101 0 eng d 9783037852859 9783038136828 (e-book) CaPaEBR CaPaEBR (OCoLC)815478952 TK7871.15.S55 H36 2010eb International Symposium on Silicon Science (6th : 2010 : Kiry�u-shi, Japan) Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura. Durnten-Zurich : Trans Tech Publications, 2012. 311 p. : ill. (some col.). Key engineering materials, 1662-9809 ; v. 497 Includes bibliographical references and indexes. Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries. Silicon Congresses. Nanostructures Congresses. Microelectronics Congresses. Electronic books. local Hanaizumi, Osamu. Unno, Masafumi. Miura, Kenta. ebrary, Inc. International Conference on Advanced Micro-Device Engineering (2nd : 2010 : Kiry�u-shi, Japan) http://site.ebrary.com/lib/rucke/Doc?id=10604223 An electronic book accessible through the World Wide Web; click to view 99882 99882