TY  - BOOK
AU  - Hanaizumi,Osamu
AU  - Unno,Masafumi
AU  - Miura,Kenta
ED  - International Symposium on Silicon Science
ED  - ebrary, Inc.
ED  - International Conference on Advanced Micro-Device Engineering
TI  - Silicon science and advanced micro-device engineering II: selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan 
AV  - TK7871.15.S55 H36 2010eb
PY  - 2012///
CY  - Durnten-Zurich
PB  - Trans Tech Publications
KW  - Silicon
KW  - Congresses
KW  - Nanostructures
KW  - Microelectronics
KW  - Electronic books
KW  - local
N1  - Includes bibliographical references and indexes; Electronic reproduction; Palo Alto, Calif.; ebrary; 2011; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://site.ebrary.com/lib/rucke/Doc?id=10604223
ER  -