01838nam a2200361 a 4500001001200000003000800012006001900020007001500039008004100054020001800095020002700113040002100140035002100161050003000182111008500212245039200297260005400689300003200743440005200775504005300827533015200880650002501032650003201057650003401089655002901123700002201152700002001174700001801194710001701212711010401229856012601333999001701459ebr10604223CaPaEBRm        u        cr cn|||||||||121005s2012    sz a    sb    101 0 eng d  z9783037852859  z9783038136828 (e-book)  aCaPaEBRcCaPaEBR  a(OCoLC)81547895214aTK7871.15.S55bH36 2010eb2 aInternational Symposium on Silicon Sciencen(6th :d2010 :cKiry�u-shi, Japan)10aSilicon science and advanced micro-device engineering IIh[electronic resource] :bselected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan /cedited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.  aDurnten-Zurich :bTrans Tech Publications,c2012.  a311 p. :bill. (some col.). 0aKey engineering materials,x1662-9809 ;vv. 497  aIncludes bibliographical references and indexes.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2011.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aSiliconvCongresses. 0aNanostructuresvCongresses. 0aMicroelectronicsvCongresses. 7aElectronic books.2local1 aHanaizumi, Osamu.1 aUnno, Masafumi.1 aMiura, Kenta.2 aebrary, Inc.2 aInternational Conference on Advanced Micro-Device Engineeringn(2nd :d2010 :cKiry�u-shi, Japan)40uhttp://site.ebrary.com/lib/rucke/Doc?id=10604223zAn electronic book accessible through the World Wide Web; click to view  c99882d99882