02741nam a2200529 a 4500001001200000003000800012006001900020007001500039008004100054010001700095020002500112020002200137020001800159020002700177040002100204035002100225050003100246082001600277111008500293245050700378246005100885246005300936246004700989246007001036246007201106246006601178246002101244246001401265246001401279260006901293300002401362440005201386504005301438533015201491650002501643650003201668650003401700655002901734700002201763700002001785710008501805710005701890710001701947711010401964856012602068999001702194ebr10604228CaPaEBRm        u        cr cn|||||||||120510s2011    sz a    sb    101 0 eng d  z  2012405162  z9780878492176 (pbk.)  z0878492178 (pbk.)  z9780878492176  z9783038134817 (e-book)  aCaPaEBRcCaPaEBR  a(OCoLC)81547900914aTK7871.15.S55bI585 2009eb04a621.3812232 aInternational Symposium on Silicon Sciencen(5th :d2009 :cKiry�u-shi, Japan)10aSilicon science and advanced micro-device engineering Ih[electronic resource] :bselected, peer reviewed papers from the 5th International Symposium on Silicon Science and the 1st International Conference on Advanced Micro-Device Engineering (ISSS & AMDE 2009), was held by the International Education and Research Center for Silicon Science and the Advanced Technology Research Center (ATEC), Gunma University on 10 and 11 December 2009 in Kiryu, Japan /cedited by Osamu Hanaizumi and Masafumi Unno.30a5th International Symposium on Silicon Science3 aFifth International Symposium on Silicon Science30aInternational Symposium on Silicon Science30a1st International Conference on Advanced Micro-Device Engineering3 aFirst International Conference on Advanced Micro-Device Engineering30aInternational Conference on Advanced Micro-Device Engineering30aISSS & AMDE 200913aISSS 200930aAMDE 2009  aStafa-Zurich ;aEnfield, N.H. :bTrans Tech Publications,c2011.  axii, 282 p. :bill. 0aKey engineering materials,x1013-9826 ;vv. 459  aIncludes bibliographical references and indexes.  aElectronic reproduction.bPalo Alto, Calif. :cebrary,d2011.nAvailable via World Wide Web.nAccess may be limited to ebrary affiliated libraries. 0aSiliconvCongresses. 0aNanostructuresvCongresses. 0aMicroelectronicsvCongresses. 7aElectronic books.2local1 aHanaizumi, Osamu.1 aUnno, Masafumi.2 aGunma Daigaku.bInternational Education and Research Center for Silicon Science.2 aGunma Daigaku.bAdvanced Technology Research Center.2 aebrary, Inc.2 aInternational Conference on Advanced Micro-Device Engineeringn(1st :d2009 :cKiry�u-shi, Japan)40uhttp://site.ebrary.com/lib/rucke/Doc?id=10604228zAn electronic book accessible through the World Wide Web; click to view  c99884d99884