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Results of search for 'su:"Plasma etching."'
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Authors
Chen, Francis F.
Series
NRL strategic series
Topics
Plasma engineering
Plasma etching
Semiconductors
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1.
Image from Google Jackets
Plasma processing and processing science
[electronic resource] /
Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
by
Chen, Francis F
, 1929-
National Research Council (U.S.). Panel on Plasma Processing
National Research Council (U.S.). Naval Studies Board
National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications
ebrary, Inc
Series:
NRL strategic series
Material type:
Text
; Format:
electronic available online
; Literary form:
Not fiction
Publication details:
Washington, D.C. :
National Academy Press,
1995
Online resources:
An electronic book accessible through the World Wide Web; click to view
Availability:
No items available.
star rating
Average : 0.0 out of 5 stars
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2.
Image from Google Jackets
Plasma processing and processing science
[electronic resource] /
Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
by
Chen, Francis F
, 1929-
National Research Council (U.S.). Panel on Plasma Processing
National Research Council (U.S.). Naval Studies Board
National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications
ebrary, Inc
Series:
NRL strategic series
Material type:
Text
; Format:
electronic available online
; Literary form:
Not fiction
Publication details:
Washington, D.C. :
National Academy Press,
1995
Online resources:
An electronic book accessible through the World Wide Web; click to view
Availability:
No items available.
star rating
Average : 0.0 out of 5 stars
Save to lists
Add to cart
(remove)
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