| 000 | 01286nam a2200325 a 4500 | ||
|---|---|---|---|
| 001 | ebr10682369 | ||
| 003 | CaPaEBR | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 130410s2013 gw a sb 001 0 eng d | ||
| 020 | _z9783527335015 | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)847543932 | ||
| 050 | 1 | 4 |
_aTK7875 _b.R45 2013eb |
| 082 | 0 | 4 |
_a539.60113 _223 |
| 245 | 0 | 0 |
_aReliability of MEMS _h[electronic resource] : _btesting of materials and devices / _cedited by Osamu Tabata, Toshiyuki Tsuchiya. |
| 260 |
_aWeinheim : _bWiley-VCH, _c2013. |
||
| 300 |
_axx, 303 p. : _bill. |
||
| 490 | 1 | _aAdvanced micro & nanosystems | |
| 500 | _aFirst edition 2007. | ||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aMicroelectromechanical systems _xReliability. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aTabata, Osamu. | |
| 700 | 1 | _aTsuchiya, Toshiyuki. | |
| 710 | 2 | _aebrary, Inc. | |
| 830 | 0 | _aAdvanced micro & nanosystems. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10682369 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c13786 _d13786 |
||