000			01425nam a2200337 a 4500
001			ebr10671225
003			CaPaEBR
006			m u
007			cr cn|||||||||
008			091112s2010 nyuad sb 001 0 eng d
010			_z 2009044341
020			_z9781608764747 (hardcover : alk. paper)
020			_z9781613246986 (e-book)
040			_aCaPaEBR _cCaPaEBR
035			_a(OCoLC)847626470
050	1	4	_aTK7875 _b.M5284 2010eb
082	0	4	_a621 _222
245	0	0	_aMicro electro mechanical systems (MEMS) _h[electronic resource] : _btechnology, fabrication processes and applications / _cBritt Ekwall and Mikkel Cronquist, editors.
260			_aHauppauge, N.Y. : _bNova Science Publishers, _cc2010.
300			_axii, 391 p. : _bill. (some col.).
490	1		_aNanotechnology science and technology
504			_aIncludes bibliographical references and index.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aMicroelectromechanical systems.
655		7	_aElectronic books. _2local
700	1		_aEkwall, Britt.
700	1		_aCronquist, Mikkel.
710	2		_aebrary, Inc.
830		0	_aNanotechnology science and technology series.
856	4	0	_uhttp://site.ebrary.com/lib/rucke/Doc?id=10671225 _zAn electronic book accessible through the World Wide Web; click to view
999			_c176159 _d176159