| 000 | 01454nam a2200373Ia 4500 | ||
|---|---|---|---|
| 001 | ebr10419114 | ||
| 003 | CaPaEBR | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 091215s2010 enka sb 001 0 eng d | ||
| 020 | _z9780470596975 | ||
| 020 | _z047059697X | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)689995793 | ||
| 050 | 1 | 4 |
_aTK7872.M3 _bM3 2010eb |
| 082 | 0 | 4 |
_a621.381531 _222 |
| 100 | 1 |
_aMa, Xu, _d1983- |
|
| 245 | 1 | 0 |
_aComputational lithography _h[electronic resource] / _cXu Ma and Gonzalo R. Arce. |
| 260 |
_aOxford : _bWiley-Blackwell, _c2010. |
||
| 300 |
_axv, 226 p. : _bill. |
||
| 490 | 1 | _aWiley series in pure and applied optics | |
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2011. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 |
_aMicrolithography _xMathematics. |
|
| 650 | 0 |
_aIntegrated circuits _xDesign and construction _xMathematics. |
|
| 650 | 0 |
_aPhotolithography _xMathematics. |
|
| 650 | 0 |
_aSemiconductors _xEtching _xMathematics. |
|
| 650 | 0 | _aResolution (Optics) | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aArce, Gonzalo R. | |
| 710 | 2 | _aebrary, Inc. | |
| 830 | 0 | _aWiley series in pure and applied optics. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10419114 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c185489 _d185489 |
||