| 000 | 01209nam a2200301 a 4500 | ||
|---|---|---|---|
| 001 | ebr10683273 | ||
| 003 | CaPaEBR | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 130422s2013 gw a sb 001 0 eng d | ||
| 020 | _z9783527334988 | ||
| 020 | _z9783527675043 (e-book) | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)846963169 | ||
| 050 | 1 | 4 |
_aTK7874 _b.E53 2013eb |
| 245 | 0 | 0 |
_aEnabling technologies for MEMS and nanodevices _h[electronic resource] : _badvanced micro and nanosystems / _cedited by Henry Baltes ... [et al.]. |
| 260 |
_aWeinheim [Germany] : _bWiley, _c2013. |
||
| 300 |
_axii, 427 p. : _bill. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aNanotechnology. | |
| 650 | 0 | _aMicroelectromechanical systems. | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 700 | 1 | _aBaltes, Henry. | |
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10683273 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c32495 _d32495 |
||