| 000 | 01338nam a2200349Ia 4500 | ||
|---|---|---|---|
| 001 | ebr10715316 | ||
| 003 | CaPaEBR | ||
| 006 | m o u | ||
| 007 | cr cn||||||||| | ||
| 008 | 130422s2013 njua sb 001 0 eng d | ||
| 010 | _z 2013016209 | ||
| 020 | _z9781118062777 (cloth : alk. paper) | ||
| 020 | _z9781118747421 (ebook) | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)841199237 | ||
| 050 | 1 | 4 |
_aTS695 _b.K33 2013eb |
| 082 | 0 | 4 |
_a620/.5 _223 |
| 100 | 1 | _aKaariainen, Tommi. | |
| 245 | 1 | 0 |
_aAtomic layer deposition _h[electronic resource] : _bprinciples, characteristics, and nanotechnology applications / _cTommi Kaariainen ... [et al.]. |
| 250 | _a2nd ed. | ||
| 260 |
_aHoboken, NJ : _bJohn Wiley & Sons, _cc2013. |
||
| 300 |
_axv, 253 p. : _bill. |
||
| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
||
| 650 | 0 | _aChemical vapor deposition. | |
| 650 | 0 | _aEpitaxy. | |
| 650 | 0 | _aMicroelectronics. | |
| 650 | 0 | _aNanotechnology. | |
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10715316 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c40842 _d40842 |
||