| 000 | 01409nam a2200361 a 4500 | ||
|---|---|---|---|
| 001 | ebr10300846 | ||
| 003 | CaPaEBR | ||
| 006 | m u | ||
| 007 | cr cn||||||||| | ||
| 008 | 071026s2007 enka sb 001 0 eng | ||
| 010 | _z 2007044548 | ||
| 015 |
_aGBA791483 _2bnb |
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| 016 | 7 |
_z014276990 _2Uk |
|
| 020 | _z9780470018934 | ||
| 020 | _z0470018933 | ||
| 020 | _z9780470727300 (pbk.) | ||
| 020 | _z0470727306 (pbk.) | ||
| 040 |
_aCaPaEBR _cCaPaEBR |
||
| 035 | _a(OCoLC)608624290 | ||
| 050 | 1 | 4 |
_aTK7874 _b.M196 2007eb |
| 082 | 0 | 4 |
_a621.3815/31 _222 |
| 100 | 1 | _aMack, Chris A. | |
| 245 | 1 | 0 |
_aFundamental principles of optical lithography _h[electronic resource] : _bthe science of microfabrication / _cChris Mack. |
| 260 |
_aChichester, West Sussex, England ; _aHoboken, NJ, USA : _bWiley, _cc2007. |
||
| 300 |
_axvii, 515 p. : _bill. |
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| 504 | _aIncludes bibliographical references and index. | ||
| 533 |
_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries. |
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| 650 | 0 |
_aIntegrated circuits _xDesign and construction. |
|
| 650 | 0 |
_aMicrolithography _xIndustrial applications. |
|
| 655 | 7 |
_aElectronic books. _2local |
|
| 710 | 2 | _aebrary, Inc. | |
| 856 | 4 | 0 |
_uhttp://site.ebrary.com/lib/rucke/Doc?id=10300846 _zAn electronic book accessible through the World Wide Web; click to view |
| 999 |
_c66481 _d66481 |
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