000			01525nam a2200313 a 4500
001			ebr10056959
003			CaPaEBR
006			m u
007			cr cn|||||||||
008			961029s1996 dcu sb 100 0 eng
010			_z 96070732
020			_z0309055911
040			_aCaPaEBR _cCaPaEBR
035			_a(OCoLC)43475625
050	1	4	_aTK7871.85 _b.D374 1996eb
245	0	0	_aDatabase needs for modeling and simulation of plasma processing _h[electronic resource] / _cPanel on Database Needs in Plasma Processing, Committee on Atomic, Molecular, and Optical Sciences and Plasma Science Committee, Board on Physics and Astronomy, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.
260			_aWashington, D.C. : _bNational Academy Press, _c1996.
300			_a64 p.
490	1		_aThe compass series
504			_aIncludes bibliographical references.
533			_aElectronic reproduction. _bPalo Alto, Calif. : _cebrary, _d2013. _nAvailable via World Wide Web. _nAccess may be limited to ebrary affiliated libraries.
650		0	_aSemiconductors _xDesign and construction _vCongresses.
650		0	_aPlasma engineering _xDatabases _vCongresses.
650		0	_aPlasma engineering _xComputer simulation _vCongresses.
655		7	_aElectronic books. _2local
710	2		_aebrary, Inc.
830		0	_aCompass series (Washington, D.C.)
856	4	0	_uhttp://site.ebrary.com/lib/rucke/Doc?id=10056959 _zAn electronic book accessible through the World Wide Web; click to view
999			_c70488 _d70488