000 01282nam a2200337 a 4500
001 ebr10323519
003 CaPaEBR
006 m u
007 cr cn|||||||||
008 010221s2001 ohua sb 000 0 eng d
010 _z 2001022339
020 _z0871707314
040 _aCaPaEBR
_cCaPaEBR
035 _a(OCoLC)646817910
050 1 4 _aTS695
_b.C52 2001eb
082 0 4 _a671.7/35
_221
245 0 0 _aChemical vapor deposition
_h[electronic resource] /
_cedited by Jong-Hee Park, T.S. Sudarshan.
260 _aMaterials Park, Ohio :
_bASM International,
_c2001.
300 _avii, 481 p. :
_bill.
490 1 _aSurface engineering series ;
_vv. 2
504 _aIncludes bibliographical references.
533 _aElectronic reproduction.
_bPalo Alto, Calif. :
_cebrary,
_d2013.
_nAvailable via World Wide Web.
_nAccess may be limited to ebrary affiliated libraries.
650 0 _aVapor-plating.
650 0 _aRefractory coating.
655 7 _aElectronic books.
_2local
700 1 _aPark, Jong-Hee,
_d1951-
700 1 _aSudarshan, T. S.,
_d1955-
710 2 _aebrary, Inc.
830 0 _aSurface engineering series ;
_vv. 2.
856 4 0 _uhttp://site.ebrary.com/lib/rucke/Doc?id=10323519
_zAn electronic book accessible through the World Wide Web; click to view
999 _c75503
_d75503