000 01518nam a2200325 a 4500
001 ebr10653595
003 CaPaEBR
006 m u
007 cr cn|||||||||
008 130212s2012 gw a sb 001 0 eng d
020 _z9783527330324
020 _z9783527646371 (e-book)
040 _aCaPaEBR
_cCaPaEBR
035 _a(OCoLC)798536325
050 1 4 _aQC585
_b.H54 2012eb
082 0 4 _a538.24
_223
245 0 0 _aHigh-k gate dielectrics for CMOS technology
_h[electronic resource] /
_cedited by Gang He and Zhaoqi Sun.
260 _aWeinheim :
_bWiley-VCH,
_c2012.
300 _axxxi, 558 p. :
_bill. (some col.)
504 _aIncludes bibliographical references and index.
505 0 _apt. 1. Scaling and challenging of Si-based CMOS -- pt. 2. High-k deposition and materials characterization -- pt. 3. Challenge in interface engineering and electrode -- pt. 4. Development in non-Si-based CMOS technology -- pt. 5. High-k Application in novel devices -- pt. 6. Challenge and directions.
533 _aElectronic reproduction.
_bPalo Alto, Calif. :
_cebrary,
_d2013.
_nAvailable via World Wide Web.
_nAccess may be limited to ebrary affiliated libraries.
650 0 _aDielectrics.
650 0 _aMetal oxide semiconductors, Complementary.
655 7 _aElectronic books.
_2local
700 1 _aHe, Gang.
700 1 _aSun, Zhaoqi.
710 2 _aebrary, Inc.
856 4 0 _uhttp://site.ebrary.com/lib/rucke/Doc?id=10653595
_zAn electronic book accessible through the World Wide Web; click to view
999 _c75743
_d75743